Specification
1. Keithley 6517(A)(B) Electrometer
- DC Source : 1000.0V ( 100.0/1000.0 Range)
- Ammeter : 100 aA
Resolution, 3 fA
offset
- Input impedance : >200TOhm
2. Keithley 8009 testfixture
- 1kV Peak source
- 0.1A Peak Test Current
- Volume Resistivity Range : 10^3 to
10^18 Ohm-cm.
- Surface Resistivity Range : 10^3 to
10^17 Ohm.
- Sample Size (Min) : 63.5 mm diameter
(2.5 in.) (surface).
- Sample Size (Max) : 101.6mm sq. x 3.2
mm thick (4 in. x 0.125 in.).
- Electrode Matrial :
Type #303 Stainless.